Semiconductor Patent Challenged In New Inter Partes Review Petition

(May 23, 2017, 1:13 PM EDT) -- ALEXANDRIA, Va. — A patent covering three process categories commonly used in the fabrication of semiconductor devices would have been obvious to a person of ordinary skill in the art, a petitioner for inter partes review told the Patent Trial and Appeal Board on May 22 (SPTS Technologies Ltd. v. Plasma-Therm LLC, No. IPR2017-01457, PTAB)....

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